Multiport Ball Valves
ANCORP’s Multiport Ball Valve is a fully-customizable high vacuum valve designed for 3- or 4-way flow in demanding semiconductor and coating processes. Its modular design and configurable components enable a variety of flow patterns through the valve.
The Multiport Ball Valve consists of a cube-shaped valve body, a fully stabilized valve stem with Extended Life (XL) technology, a fully ported ball, and end caps (body ports), all machined from corrosion-resistant 316L stainless steel. Flanged body ports or blank end caps are installed on the sides or bottom of the valve body to create the desired flow paths. An L-port, T-port, or other ported ball rotates within the valve to switch flow between body ports.
FKM or FFKM O-rings seal the valve stem and end caps from atmosphere, while PTFE seats cold flow around the ball, creating a seal to prevent internal leaking between ports. The PTFE sealing surfaces are protected from direct deposition or contact with process matter, maintaining a clean, dynamic seal to prevent failure due to contamination.
The valve is available in two designs: the Multiport Ball Valve, for general applications; and the Multiport Ball Valve with Heat-Thru™ Technology, designed for high thermal performance when used with heating elements.
Applications
The corrosive-resistant, fast-actuating design of ANCORP’s Multiport Ball Valve makes it ideal for diverting, switching, combining, or splitting flow in and around reactors, traps, scrubbers, and exhaust lines on vacuum coating, etching, and abatement tools. With a fully ported ball and minimally wetted internal components, the Multiport Ball Valve resists particulate buildup and valve contamination from harsh downstream environments.
Multiport Valve Configuration
The Multiport valve’s modular design allows for six body port configurations and six ball configurations. Body ports, ball ports, ball position, and actuation type can be specified to enable a variety of flow switching, diverting, or mixing operations between source and destination ports.
Body Port Configurations
Body ports or blank end caps can be configured on the sides and bottom of the valve body to make a 3- or 4-way valve.
Three Way Valve
3-way valve body port configurations include 3H (3 ports in a horizontal orientation), 2HI1V (two horizontal inline ports with one vertical port on the bottom face), and 2HA1V (two horizontal ports at an angle with one vertical port on the bottom face).
Four Way Valve
4-way valve configurations include 4H (four horizontal ports on all side faces of the valve) and 3H1V (three horizontal ports with one vertical port on the bottom face).
The flame icon indicates compatibilty with Heat-Thru™ technology.
Ball Port Configurations
Ball types include L-port, T-port, vertical L-port (VL), vertical T-port (VT), double L-port (LL), and double T-port (TT). Standard L-port and T-port balls have ports oriented horizontally for use with 3-way or 4-way valves with no vertical bottom port. Vertical L-port, vertical T-port, double L-port, and double-T port valves have both horizontal and vertical ball ports for use in multiport valves with vertical body ports on the bottom face of the valve.
Actuation
The valve can be actuated manually or pneumatically. Manual valves can be actuated by turning the handle in 90° increments, with full 360° rotations possible.
Spring return actuators use compressed air to turn the ball 90° counterclockwise, and spring forces to rotate the ball 90° clockwise back to its starting position. In the event the actuator loses air pressure, the springs will rotate the valve back to its starting position. For that reason, these actuators are often referred to as fail-safe actuators.
Double-acting actuators use compressed air to cycle the valve 90° counterclockwise as well as to cycle the valve 90° clockwise back to its starting position. The valves can be customized with other actuation methods, such as electrical actuation or 180° pneumatic actuation, upon request.
The position of the actuation device, whether manual or pneumatic, can be specified to avoid interference problems in tight spaces and allow for the convenient connection of air lines.
Allows for easy rotation in 90° increments
Let's Get Started
Start by submitting a quote for your Multiport Ball Valve.
You can submit your quote through our Request a Quote form below or by contacting a member of our technical sales team.
For more information on Multiport Ball Valves, download our brochure here: