VAT Vacuum Pendulum Valves
Vacuum pendulum valves can be used for vacuum isolation or downstream pressure control. A pendulum valve’s gate rotates to open, close, or adjust flow through the valve opening. These valves feature a compact design and a smooth opening and closing motion with low shock and vibration when operated for low particle generation. Pendulum valves can be actuated pneumatically or with a motor and controller for precise conductance control.
VAT’s Series 162 HV Pendulum Isolation Valve is an excellent choice for high vacuum isolation in harsh or corrosive processes such as sputtering and evaporation.