VAT Vacuum Butterfly Valves
Vacuum butterfly valves are used as vacuum control valves, isolation valves, or a combination of both. Butterfly valves utilize a circular plate, or flapper, that rotates around an internal axis to throttle or regulate flow through the valve. If using an O-ring seal on the plate, a butterfly valve can shut off flow entirely when closed. These valves can be actuated manually or pneumatically or use a stepper motor with controller for precise control of gas flow.
VAT’s Series 613 Butterfly Control Valve offers precise downstream pressure control and features an integrated controller with stepper motor. It is an excellent choice for harsh processes such as ALD and CVD.
ANCORP is a North American distributor of VAT vacuum valves. Contact us for more information on VAT vacuum butterfly valves or request a quote.