Butterfly Control Valve (Series 613)

VAT’s Series 613 Butterfly Control Valve offers precise downstream pressure control for high vacuum applications and is great for harsh processes with high particulate buildup such as CVD and ALD. This butterfly valve features an integrated pressure controller to calculate the throttling plate position and achieve the required pressure.

 

Series 613 valves are available in stainless steel or aluminum and sizes from DN 25 (1″) to DN 320 (12″). Standard flanges include ISO-KF (QF quick flange) and ISO-F (bolted ISO-LFB). Other options available upon request include special FFKM/FKM seals, an integrated heater, and other flange configurations.

 

ANCORP is a North American distributor of VAT vacuum valves. Contact us for more information on VAT Series 613 Butterfly Control Valves or request a quote.

 

Features

  • Fast, precise pressure control
  • Integrated controller and software
  • Robust in harsh processes

Technical Data

  • Sizes: DN 25 (1″) DN 40 (1½””), DN 50 (2″), DN 63 (2½”), DN 80 (3″), DN 100 (4″), DN 160 (6″), DN 200 (8″), DN 250 (10″), DN 320 (12″)
  • Actuator: Integrated controller with stepper motor
    • Open/Close: < 0.1 s (depending on DN size and plate material)
  • Body Material: Aluminum or Stainless Steel
  • Standard Flanges: ISO-KF, ISO-F
  • Leak Rate Valve Body:
    • Aluminum: < 1×10-9 mbar ls-1
    • Stainless Steel: < 1×10-9 mbar ls-1
  • Pressure Range: 1×10-8 mbar to 1.2 bar (abs)
  • Cycles Until First Service, Pressure Control: 2 Million (*depending on operating conditions and sealing materials)
  • Temperature:
    • Valve Body: ≤ 150°C
  • Material:
    • Valve body, plate: EN AW-6082 (3.2315) or AISI 316L (1.4404 or 1.4435)
    • Shaft: AISI 316L (1.4404 or 1.4435)
  • Seal: Feedthrough: FKM (Viton®)
  • Mounting Position: Shaft on Pump side recommended
  • Max. Differential – Pressure on the Plate: 1,000 mbar (DN 25) … 75 mbar (DN 320)
  • Conductance – Molecular Flow: 22 ls-1 (DN 25) … 27,000 ls-1 (DN 320)
  • Minimum Controllable Conductance – Molecular Flow: 0.15 ls-1 (DN 25) … 6 ls-1 (DN 320)
  • Typical Closing/Opening Time “Position Only” Version – Aluminum, Stainless Steel:
    • 0.09 s (DN 25) … 0.29 s (DN 320)
  • Weight:
    • Aluminum valve: 2.0 kg (4.40 lbs) (DN 25) … 10.4 kg (23 lbs) (DN 320)
    • Stainless steel valve: 2.5 kg (5.5 lbs) (DN 25) … 12.3 (27.1 lbs) (DN 320)