HV Gate Valve (Series 140)

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The VAT Series 140 High Vacuum Gate Valve offers reliable high vacuum isolation in high cycle processes. Featuring VATLOCK technology, this valve provides a frictionless seal at the gate and mechanical lock-in when closed to help prevent gate failure. This valve has a stainless steel body and is free of lubricants. A variety of actuation options are available including manual lever, handwheel, and 3-position pneumatic actuation. Options are available for multiple actuator positions, roughing ports, and gauge ports. Valve sizes range from DN 63 (2.5″) to DN400 (16″).

The VAT Series 140 HV gate valve has a long cycle life, reliable performance, and robust stainless steel construction which makes it an excellent choice for standard high vacuum processes and high cycle processes. It’s great for use in pump isolation, semiconductor sub-fab applications, and production coating systems.

ANCORP is a North American distributor of VAT vacuum valves. Contact us for more information on VAT Series 140 HV Gate Valves or request a quote.

Features

  • Long cycle life
  • Lubricant-free
  • VATLOCK gate technology
  • Side-mounted, compact actuator
  • Rotary feedthrough

Technical Data

  • Sizes: DN 63 (2½”), DN 80 (3″), DN 100 (4″), DN 160 (6″), DN 200 (8″), DN 250 (10″), DN 320 (12″), DN 400 (16″)
  • Actuator:
    • 3-Position Pneumatic: Double acting
    • Manual: Lever or handwheel
  • Body Material: Stainless steel
  • Feedthrough: Rotary Feedthrough
  • Standard Flanges: ISO-F, CF-F, ASA-LP/ASA, JIS
  • Leak Rate:
    • Valve body: < 1×10-9 mbar ls-1
    • Valve seat: < 1×10-9 mbar ls-1
  • Pressure Range:
    • 1×10-8 mbar to 2 bar (abs) (DN 63 – 200)
    • 1×10-8 mbar to 1.2 bar (abs) (DN 250 – 400)
  • Differential Pressure:
    • On the Gate:
      • ≤ 2 bar (DN 63 – 200)
      • ≤ 1.2 bar (DN 250 – 400)
    • At Opening: ≤ 30 mbar
  • Cycles Until First Service: 200,000
  • Temperature:
    • Valve Body: ≤ 150 °C
    • Pneumatic Actuator: ≤ 50 °C
    • Manual Actuator: ≤ 80 °C
    • Solenoid Valve: ≤ 50 °C
    • Position Indicator: ≤ 80 °C
  • Heating and Cooling Rate: ≤ 50 °C h-1
  • Material:
    • Valve Body: AISI 304 (1.4301)
    • Mechanism: AISI 301 (1.4310), AISI 304 (1.4301), AISI 316L (1.4404), AISI 420 (1.4034)
  • Seal: Bonnet, Gate: FKM Viton®
  • Mounting Position:
    • Any (DN 63 – 350)
    • Horizontal (DN400)
  • Solenoid Valve: 24 VDC, 2.5 W (others on request)
  • Position Indicator: Contact Rating:
    • Voltage ≤ 250 VAC | Current ≤ 5 A
    • Voltage ≤ 50 VDC | Current ≤ 3 A
  • Valve Position Indication: Visual (Mechanical)