HV Pendulum Isolation Valve (Series 162)

VAT’s Series 162 HV Pendulum Isolation Valve features a slim design and low particle generation due to its smooth opening and closing operation. This high vacuum valve is great for use in harsh and corrosive processes such as sputtering and evaporation. It features a split body design that allows for in-place maintenance without removal from the vacuum line or chamber connection.

 

The Series 162 valve body is made of aluminum (hard anodized or nickel-plated), and standard flange connections include ISO-F (bolted ISO-LFB), ASA-LP, and JIS. Sizes are available from DN 200 (8″) to DN 500 (20″). Actuator options include 3-position pneumatic, single acting with closing spring or standard pneumatic, single acting with closing spring. Ports for venting, roughing, or gauges can be added. Plate windows are also available.

 

ANCORP is a North American distributor of VAT vacuum valves. Contact us for more information on VAT Series 162 HV Pendulum Isolation Valves or request a quote.

 

Features

  • Slim design can be mounted directly to chamber
  • Great for corrosive or harsh environments
  • Low shock when operated for low particle generation
  • Split body design

Technical Data

  • Sizes: DN 200 (8″), DN 250 (10″), DN 320 (12″), DN 350 (14″), DN 400 (16″), DN 500 (20″)
  • Actuator:
    • Pneumatic: Single acting with closing spring (normally closed)
    • 3-Position Pneumatic: Single acting with closing spring (normally closed)
  • Body Material: Aluminum
  • Feedthrough: Rotary feedthrough
  • Standard Flanges: ISO-F, ASA-LP, JIS
  • Leak Rate:
    • Valve body, valve seat: < 1×10-8 mbar ls-1
  • Pressure Range: 1×10-8 mbar to 1.2 bar (abs)
  • Differential Pressure:
    • On the Plate: ≤ 1.2 bar
    • At Opening:
      • DN 200: ≤ 10 mbar
      • DN 250 – 500: ≤ 5 mbar
  • Cycles Until First Service: 200,000
  • Temperature:
    • Valve Body: ≤ 120°C
    • Manual Actuator: ≤ 80°C
    • Solenoid Valve: ≤ 50°C
    • Position Indicator: ≤ 80°C
  • Heating and Cooling Rate: ≤ 30°C h-1
  • Material:
    • Valve body, plate, sealing ring:
      • DN200 – 400: EN AW-5083 (3.3547), EN AW-6082 (3.2315)
      • DN500: EN AC-42100 (3.2371)
    • Feedthrough (parts in contact with media): AISI 303 (1.4305), AISI 304 (1.4301)
  • Seal: Bonnet, plate, dynamic, feedthrough: FKM (Viton®)
  • Mounting Position: Any
  • Solenoid Valve: 24 V DC, 5.4 W (others on request)
  • Position Indicator:
    • Voltage: ≤ 50 V AC/DC
    • Current: ≤ 1.2 A
  • Valve Position Indication: Visual (Mechanical)