Pneumatic UHV Angle Valve

VAT’s Series 284 UHV Angle Valve is excellent for pumping and venting of UHV systems when an extremely low outgassing rate is important. Suited for most corrosive gases.

Pneumatic valves come standard with a position indicator and without a solenoid valve. Solenoid valves are available upon request.

Main Features

  • Sizes: DN 16–63 mm (5/8″–2.5″)
  • Actuator: pneumatic single acting with closing spring (NC)
  • Body material: stainless steel
  • Feedthrough: bellows
  • Standard flanges: CF-R (rotatable)

Technical Data

  • Leak rate:
    • Valve body: < 5×10-10 mbar ls-1
    • Valve seat: < 1×10-9 mbar ls-1
  • Pressure range: 5×10-10 mbar to 5 bar (abs)
  • Differential pressure on the plate:
    • In opening direction: ≤ 2.0 bar
    • In closing direction: ≤ 5.0 bar
  • Differential pressure at opening: ≤ 1 bar
  • Cycles until first service: 3 million
  • Temperature:
    • Valve body: ≤ 150°C
    • Pneumatic actuator: ≤ 150°C
    • Solenoid valve & position indicator: ≤ 80°C
  • Material:
    • Valve body:
      • DN 16, 40: AISI 304 (1.4301)
      • DN 63: AISI 316L (1.4404, 1.4435)
    • Plate: AISI 316L (1.4404, 1.4435)
    • Bellows: AISI 316L (1.4404, 1.4435)
  • Seal:
    • Bonnet: metal
    • Plate: FKM (Viton)
  • Mounting position: any
  • Solenoid valve: 24 V DC (others on request)
  • Position indicator contact rating:
    • Voltage: 5–50 V AC/DC
    • Current: 5–100 mA
  • Valve position indication: visual (mechanical)

*Dimensions are in inches unless otherwise specified

Part IDReference NumberSize (mm) Size (in.) Flange Ends 3D CADDrawingUnit PriceQty, Add To Cart
Part IDVAT28424-GE21Reference NumberVAT28424-GE21Size (mm) 16Size (in.) 5/8Flange Ends CF1333D CADLoginDrawingLoginUnit Price$493.10
Part IDVAT28432-GE21Reference NumberVAT28432-GE21Size (mm) 40Size (in.) 1-1/2Flange Ends CF2753D CADLoginDrawingLoginUnit Price$599.00
Part IDVAT28436-GE21Reference NumberVAT28436-GE21Size (mm) 63Size (in.) 2-1/2Flange Ends CF4503D CADLoginDrawingLoginUnit Price$1,263.00