VAT59024-GEGG
⅝” (DN 16) SS ALL METAL LEAK VALVE CF133R (DN 16) RS232 INTERFACE/ 1 SENSOR
$7,468.00
Part ID: VAT59024-GEGG
Used for the precise control of very small gas flows, the 59.0 series All-Metal Pneumatic Leak Valve offers ultra-high and extremely high vacuum users enhanced process control and precise reproducibility of flow settings.
Main Features
- Sizes: DN 16 mm (5/8″)
- Actuator: Integrated or detachable pressure controller with stepper motor
- Body material: stainless steel
- Standard flanges: CF-R
- Sealing technology: diaphragm sealing/”hard on hard”
Resources
Technical Data
Leak Rate
- Valve Body and Valve Seat: < 1 × 10-10 mbar ls-1
Pressure Range
- UHV to 10 bar (abs)
Differential Pressure at Opening: ≤ 10 bar
Dead Volume
- Angle Valve
- Seat Side: 2.7 cm3
- Side Port: 1.1 cm3
- Inline Valve
- Seat Side: 0.98 cm3
- Side Port: 1.01 cm3
Cycles Until First Service: 20,000
Bake-Out Temperature
- Valve Body: ≤ 300 °C
- Controller with Stepper Motor: ≤ 50 °C
Heating and Cooling Rate: ≤ 60 °C h-1
Material
- Valve Body: AISI 660 (1.4943), AISI 316L (1.4404)
- Diaphragm: AISI 301 (1.4310), gold-plated
Mounting Position: Any
Valve Position Indication: Visual (Mechanical)
Conductance (Molecular Flow): 0.05 ls-1
Adjustable Gas Flow: 1 × 10-10 mbar ls-1 to 500 mbar ls-1
- Position Indicator: ≤ 80 °C
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Attributes
All dimensions are in inches unless otherwise specified.