Attributes

Size (in) DN 16 (⅝")
Material Stainless steel
Actuator RS232 interface / 1 sensor
Position Indicator Signal No
Solenoid Valve No
Flange CF-R Rotatable Flange
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VAT59024-GEGG

⅝” (DN 16) SS ALL METAL LEAK VALVE CF133R RS232 INTERFACE/ 1 SENSOR

$6,465.00

Part ID: VAT59024-GEGG
 

Used for the precise control of very small gas flows, the 59.0 series All-Metal Pneumatic Leak Valve offers ultra-high and extremely high vacuum users enhanced process control and precise reproducibility of flow settings.

 

Main Features

  • Sizes: DN 16 mm (5/8″)
  • Actuator: Integrated or detachable pressure controller with stepper motor
  • Body material: stainless steel
  • Standard flanges: CF-R
  • Sealing technology: diaphragm sealing/”hard on hard”

Technical Data

Leak Rate

  • Valve Body and Valve Seat: < 1 × 10-10 mbar ls-1

Pressure Range

  • UHV to 10 bar (abs)

Differential Pressure at Opening: ≤ 10 bar

Dead Volume

  • Angle Valve
    • Seat Side: 2.7 cm3
    • Side Port: 1.1 cm3
  • Inline Valve
    • Seat Side: 0.98 cm3
    • Side Port: 1.01 cm3

Cycles Until First Service: 20,000

Bake-Out Temperature

  • Valve Body: ≤ 300 °C
  • Controller with Stepper Motor: ≤ 50 °C

Heating and Cooling Rate: ≤ 60 °C h-1

Material

  • Valve Body: AISI 660 (1.4943), AISI 316L (1.4404)
  • Diaphragm: AISI 301 (1.4310), gold-plated

Mounting Position: Any

Valve Position Indication: Visual (Mechanical)

Conductance (Molecular Flow): 0.05 ls-1

Adjustable Gas Flow: 1 × 10-10 mbar ls-1 to 500 mbar ls-1

  • Position Indicator: ≤ 80 °C

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