Pneumatic HV Aluminum Angle Valve

VAT’s Series 264 HV Aluminum Angle Valve is an excellent valve for pumping and venting of high vacuum systems.

Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

Pneumatic valves come standard with a position indicator and without a solenoid valve. Solenoid valves are available upon request.

 Main Features

  • Sizes: DN 16–160 mm (5/8″–6″)
  • Actuator: pneumatic single acting with closing spring (NC) or double acting
  • Body material: aluminum (available in stainless steel upon request)
  • Feedthrough: bellows
  • Standard flanges: ISO-QF (ISO-KF), ISO-LF (ISO-K)

Technical Data

  • Leak rate (valve body, valve seat): < 1×10-9 mbar ls-1
  • Pressure range:
    • DN 16–50: 1×10-8 mbar to 5 bar (abs)
    • DN 63–80: 1×10-8 mbar to 4 bar (abs)
    • DN 100–160: 1×10-8 mbar to 2 bar (abs)
  • Differential pressure on the plate:
    • In opening direction:
      • DN 16–50: ≤ 2.0 bar
      • DN 63–160: ≤ 1.2 bar
    • In closing direction:
      • DN 16–50: ≤ 5.0 bar
      • DN 63–80: ≤ 4.0 bar
      • DN 100–160: ≤ 2.0 bar
  • Differential pressure at opening: ≤ 1 bar
  • Cycles until first service
    • DN 16–80: 3 million (NC)
    • DN 100–160: 1 million (NC, double acting)
  • Temperature:
    • Valve body: ≤ 150°C
    • Actuator: ≤ 120°C
    • Solenoid valve and position indicator:
      • DN 16–80: ≤ 80°C
      • DN 100–160: ≤ 50°C
  • Material:
    • Aluminum valve body:
      • DN 16–63: EN AW-6060 (3.3206), EN AW-6061 (3.3211), EN AW-6063 (3.3206), EN AW-6082 (3.2315)
      • DN 80–160: EN AC-42000
    • Plate: AISI 316L (1.4404, 1.4435)
    • Bellows: AISI 316L (1.4404, 1.4435), AISI 316 Ti (1.4571)
  • Seal (bonnet, gate): FKM (Viton)
  • Mounting position: any
  • Solenoid valve:
    • DN 16–80: 24 V DC, 2.5 W (others on request)
    • DN 100–160: 24 V DC, 1.0 W (others on request)
  • Position indicator:
    • Voltage: 5–50 V AC/DC
    • Current: 5–100 mA
  • Valve position indication: visual (mechanical)

*Dimensions are in inches unless otherwise specified

Part IDReference NumberSize (mm) Size (in.) Flange Ends Availability Actuator Type 3D CADDrawingUnit PriceQty, Add To Cart
Part IDVAT26424-KA21Reference NumberVAT26424-KA21Size (mm) 16Size (in.) 5/8Flange Ends QF16Availability CallActuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$293.10
Part IDVAT26428-KA21Reference NumberVAT26428-KA21Size (mm) 25Size (in.) 1Flange Ends QF25Availability Typically StockedActuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$335.10
Part IDVAT26432-KA21Reference NumberVAT26432-KA21Size (mm) 40Size (in.) 1-1/2Flange Ends QF40Availability Typically StockedActuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$356.10
Part IDVAT26434-KA21Reference NumberVAT26434-KA21Size (mm) 50Size (in.) 2Flange Ends QF50Availability CallActuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$483.10
Part IDVAT26436-QA21Reference NumberVAT26436-QA21Size (mm) 63Size (in.) 2-1/2Flange Ends LF63Availability CallActuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$820.10
Part IDVAT26438-QA21Reference NumberVAT26438-QA21Size (mm) 80Size (in.) 3Flange Ends LF80Availability CallActuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$926.10
Part IDVAT26440-QA21Reference NumberVAT26440-QA21Size (mm) 100Size (in.) 4Flange Ends LF100Availability CallActuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$1,580.10
Part IDVAT26444-QA21Reference NumberVAT26444-QA21Size (mm) 160Size (in.) 6Flange Ends LF160Availability CallActuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$2,308.10
Part IDVAT26440-QA24Reference NumberVAT26440-QA24Size (mm) 100Size (in.) 4Flange Ends LF100Availability CallActuator Type Double Acting3D CADLoginDrawingLoginUnit Price$1,367.00
Part IDVAT26444-QA24Reference NumberVAT26444-QA24Size (mm) 160Size (in.) 6Flange Ends LF160Availability CallActuator Type Double Acting3D CADLoginDrawingLoginUnit Price$1,987.00