Pneumatic HV Aluminum Angle Valve

VAT’s Series 264 HV Aluminum Angle Valve is an excellent valve for pumping and venting of high vacuum systems.

Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

Pneumatic valves come standard with a position indicator and without a solenoid valve. Solenoid valves are available upon request.

 Main Features

  • Sizes: DN 16–160 mm (5/8″–6″)
  • Actuator: pneumatic single acting with closing spring (NC) or double acting
  • Body material: aluminum (available in stainless steel upon request)
  • Feedthrough: bellows
  • Standard flanges: ISO-QF (ISO-KF), ISO-LF (ISO-K)

Technical Data

  • Leak rate (valve body, valve seat): < 1×10-9 mbar ls-1
  • Pressure range:
    • DN 16–50: 1×10-8 mbar to 5 bar (abs)
    • DN 63–80: 1×10-8 mbar to 4 bar (abs)
    • DN 100–160: 1×10-8 mbar to 2 bar (abs)
  • Differential pressure on the plate:
    • In opening direction:
      • DN 16–50: ≤ 2.0 bar
      • DN 63–160: ≤ 1.2 bar
    • In closing direction:
      • DN 16–50: ≤ 5.0 bar
      • DN 63–80: ≤ 4.0 bar
      • DN 100–160: ≤ 2.0 bar
  • Differential pressure at opening: ≤ 1 bar
  • Cycles until first service
    • DN 16–80: 3 million (NC)
    • DN 100–160: 1 million (NC, double acting)
  • Temperature:
    • Valve body: ≤ 150°C
    • Actuator: ≤ 120°C
    • Solenoid valve and position indicator:
      • DN 16–80: ≤ 80°C
      • DN 100–160: ≤ 50°C
  • Material:
    • Aluminum valve body:
      • DN 16–63: EN AW-6060 (3.3206), EN AW-6061 (3.3211), EN AW-6063 (3.3206), EN AW-6082 (3.2315)
      • DN 80–160: EN AC-42000
    • Plate: AISI 316L (1.4404, 1.4435)
    • Bellows: AISI 316L (1.4404, 1.4435), AISI 316 Ti (1.4571)
  • Seal (bonnet, gate): FKM (Viton)
  • Mounting position: any
  • Solenoid valve:
    • DN 16–80: 24 V DC, 2.5 W (others on request)
    • DN 100–160: 24 V DC, 1.0 W (others on request)
  • Position indicator:
    • Voltage: 5–50 V AC/DC
    • Current: 5–100 mA
  • Valve position indication: visual (mechanical)

*Dimensions are in inches unless otherwise specified

Part IDReference NumberSize (mm) Size (in.) Flange Ends Actuator Type 3D CADDrawingUnit PriceIn StockQty, Add To Cart
Part IDVAT26424-KA21Reference NumberVAT26424-KA21Size (mm) 16Size (in.) 5/8Flange Ends QF16Actuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$315.00Contact
Part IDVAT26428-KA21Reference NumberVAT26428-KA21Size (mm) 25Size (in.) 1Flange Ends QF25Actuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$360.00Contact
Part IDVAT26432-KA21Reference NumberVAT26432-KA21Size (mm) 40Size (in.) 1-1/2Flange Ends QF40Actuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$287.251
Part IDVAT26434-KA21Reference NumberVAT26434-KA21Size (mm) 50Size (in.) 2Flange Ends QF50Actuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$518.00Contact
Part IDVAT26436-QA21Reference NumberVAT26436-QA21Size (mm) 63Size (in.) 2-1/2Flange Ends LF63Actuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$878.00Contact
Part IDVAT26438-QA21Reference NumberVAT26438-QA21Size (mm) 80Size (in.) 3Flange Ends LF80Actuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$991.00Contact
Part IDVAT26440-QA21Reference NumberVAT26440-QA21Size (mm) 100Size (in.) 4Flange Ends LF100Actuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$1,691.00Contact
Part IDVAT26444-QA21Reference NumberVAT26444-QA21Size (mm) 160Size (in.) 6Flange Ends LF160Actuator Type Single Acting with Closing Spring (NC)3D CADLoginDrawingLoginUnit Price$2,470.00Contact
Part IDVAT26440-QA24Reference NumberVAT26440-QA24Size (mm) 100Size (in.) 4Flange Ends LF100Actuator Type Double Acting3D CADLoginDrawingLoginUnit Price$1,462.00Contact
Part IDVAT26444-QA24Reference NumberVAT26444-QA24Size (mm) 160Size (in.) 6Flange Ends LF160Actuator Type Double Acting3D CADLoginDrawingLoginUnit Price$2,124.00Contact