Pneumatic HV Aluminum Inline Valve

VAT’s Series 265 HV Aluminum Inline Valve is an excellent valve for pumping and venting of high vacuum systems.

Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.

Pneumatic valves come standard with a position indicator and without a solenoid valve. Solenoid valves are available upon request.

 Main Features

  • Sizes: DN 16–80 mm (5/8″–3″)
  • Actuator: pneumatic single acting with closing spring (NC)
  • Body material: aluminum (available in stainless steel upon request)
  • Feedthrough: bellows
  • Standard flanges: ISO-QF (ISO-KF), ISO-LF (ISO-K)

Technical Data

  • Leak rate (valve body, valve seat): < 1×10-9 mbar ls-1
  • Pressure range:
    • DN 16–50: 1×10-8 mbar to 5 bar (abs)
    • DN 80: 1×10-8 mbar to 4 bar (abs)
  • Differential pressure on the plate:
    • In opening direction:
      • DN 16–50: ≤ 2.0 bar
      • DN 80: ≤ 1.2 bar
    • In closing direction:
      • DN 16–50: ≤ 5.0 bar
      • DN 80: ≤ 4.0 bar
  • Differential pressure at opening: ≤ 1 bar
  • Cycles until first service (DN 16–80): 3 million (NC)
  • Temperature:
    • Valve body: ≤ 150°C
    • Actuator: ≤ 120°C
    • Solenoid valve and position indicator (DN 16–80): ≤ 80°C
  • Material:
    • Aluminum valve body:
      • DN 16–63: EN AW-6060 (3.3206), EN AW-6061 (3.3211), EN AW-6063 (3.3206), EN AW-6082 (3.2315)
      • DN 80: EN AC-42000
    • Plate: AISI 316L (1.4404, 1.4435)
    • Bellows: AISI 316L (1.4404, 1.4435), AISI 316 Ti (1.4571)
  • Seal (bonnet, gate): FKM (Viton)
  • Mounting position: any
  • Solenoid valve (DN 16–80): 24 V DC, 2.5 W (others on request)
  • Position indicator:
    • Voltage: 5–50 V AC/DC
    • Current: 5–100 mA
  • Valve position indication: visual (mechanical)

*Dimensions are in inches unless otherwise specified

Part IDReference NumberSize (mm) Size (in.) Flange Ends 3D CADDrawingUnit PriceQty, Add To Cart
Part IDVAT26524-KA21Reference NumberVAT26524-KA21Size (mm) 16Size (in.) 5/8Flange Ends QF163D CADLoginDrawingLoginUnit Price$409.10
Part IDVAT26528-KA21Reference NumberVAT26528-KA21Size (mm) 25Size (in.) 1Flange Ends QF253D CADLoginDrawingLoginUnit Price$451.10
Part IDVAT26532-KA21Reference NumberVAT26532-KA21Size (mm) 40Size (in.) 1-1/2Flange Ends QF403D CADLoginDrawingLoginUnit Price$472.10
Part IDVAT26534-KA21Reference NumberVAT26534-KA21Size (mm) 50Size (in.) 2Flange Ends QF503D CADLoginDrawingLoginUnit Price$662.10