Pneumatic HV Aluminum Inline Valve
VAT’s Series 265 HV Aluminum Inline Valve is an excellent valve for pumping and venting of high vacuum systems.
Series 26 valves are bellows sealed and designed for high vacuum applications in pumping systems, semiconductor technology, research systems, etc.
Pneumatic valves come standard with a position indicator and without a solenoid valve. Solenoid valves are available upon request.
Main Features
- Sizes: DN 16–80 mm (5/8″–3″)
- Actuator: pneumatic single acting with closing spring (NC)
- Body material: aluminum (available in stainless steel upon request)
- Feedthrough: bellows
- Standard flanges: ISO-QF (ISO-KF), ISO-LF (ISO-K)
Resources
Technical Data
- Leak rate (valve body, valve seat): < 1×10-9 mbar ls-1
- Pressure range:
- DN 16–50: 1×10-8 mbar to 5 bar (abs)
- DN 80: 1×10-8 mbar to 4 bar (abs)
- Differential pressure on the plate:
- In opening direction:
- DN 16–50: ≤ 2.0 bar
- DN 80: ≤ 1.2 bar
- In closing direction:
- DN 16–50: ≤ 5.0 bar
- DN 80: ≤ 4.0 bar
- In opening direction:
- Differential pressure at opening: ≤ 1 bar
- Cycles until first service (DN 16–80): 3 million (NC)
- Temperature:
- Valve body: ≤ 150°C
- Actuator: ≤ 120°C
- Solenoid valve and position indicator (DN 16–80): ≤ 80°C
- Material:
- Aluminum valve body:
- DN 16–63: EN AW-6060 (3.3206), EN AW-6061 (3.3211), EN AW-6063 (3.3206), EN AW-6082 (3.2315)
- DN 80: EN AC-42000
- Plate: AISI 316L (1.4404, 1.4435)
- Bellows: AISI 316L (1.4404, 1.4435), AISI 316 Ti (1.4571)
- Aluminum valve body:
- Seal (bonnet, gate): FKM (Viton)
- Mounting position: any
- Solenoid valve (DN 16–80): 24 V DC, 2.5 W (others on request)
- Position indicator:
- Voltage: 5–50 V AC/DC
- Current: 5–100 mA
- Valve position indication: visual (mechanical)
*Dimensions are in inches unless otherwise specified
| Part ID | Reference Number | Size (mm) | Size (in.) | Flange Ends | 3D CAD | Drawing | Unit Price | In Stock | Qty, Add To Cart | ||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Part ID | VAT26524-KA21 | Reference Number | VAT26524-KA21 | Size (mm) | 16 | Size (in.) | 5/8 | Flange Ends | QF16 | 3D CAD | Login | Drawing | Login | Unit Price | $439.00 | Contact | |
| Part ID | VAT26528-KA21 | Reference Number | VAT26528-KA21 | Size (mm) | 25 | Size (in.) | 1 | Flange Ends | QF25 | 3D CAD | Login | Drawing | Login | Unit Price | $483.00 | Contact | |
| Part ID | VAT26532-KA21 | Reference Number | VAT26532-KA21 | Size (mm) | 40 | Size (in.) | 1-1/2 | Flange Ends | QF40 | 3D CAD | Login | Drawing | Login | Unit Price | $506.00 | Contact | |
| Part ID | VAT26534-KA21 | Reference Number | VAT26534-KA21 | Size (mm) | 50 | Size (in.) | 2 | Flange Ends | QF50 | 3D CAD | Login | Drawing | Login | Unit Price | $710.00 | Contact |