ANCORP has been building high and ultra-high vacuum chambers for over 30 years. Vacuum chambers are employed in a variety of industries and applications. Our range of projects extends from one-of-a-kind chambers for research applications through production quantity chambers for OEM’s. You will find ANCORP vacuum chambers in materials research labs (mass spectrometry, energy dispersive spectroscopy, Low Energy Electron Diffraction/Auger surface analysis), physics research labs (particle accelerators, condensed matter, nanotechnology), and chemical engineering labs (semiconductor processing). Our industrial customers are involved in coating (architectural glass, automotive parts, compact disks), helium leak detection, and semiconductor processing (Chemical Vapor Deposition, Physical Vapor Deposition, etching, ion implantation).Request a Custom Quote
ANCORP Custom Vacuum Chamber Capabilities
High and ultra-high vacuum chambers are engineered products that require a specialized set of materials and fabrication processes. To help designers and practitioners better understand system specifications, a brief overview of ANCORP’s capabilities and practices follows:
Because of its high corrosion resistance, low outgassing rates, wide range of applicable temperatures, machinability, weldability, and relative cost, ANCORP’s standard material for tube sections, spheres and roll-ups is 304L stainless steel. Many other materials are available upon request.
ANCORP specifies a magnetic permeability not to exceed 1.02µ when ordering raw 304 stainless materials. Welding and machining processes may result in heat affected or cold-worked zones that may increase magnetic permeability in these zones. Minimizing seams, joints, and bends in areas of high magnetic sensitivity should be considered during the design process. For applications that require superior magnetic flux shielding, mumetal can also be supplied.
ANCORP’s flanges are made from specially manufactured raw stock that is designed to maximize the vacuum capabilities of 304 stainless. These processes minimize impurities and inclusions that could adversely impact the steel’s ability to maintain vacuum. Grain size, orientation, and density are also engineered to maximize the vacuum performance of the raw stock.
ANCORP uses tungsten inert gas (TIG/GTAW) welding techniques with high purity argon as the backfill/purge gas. Both manual and automated orbital welding machines are employed. In accordance with good UHV fabrication practices, non-filler material, internal fusion weld joints are utilized wherever possible. In those instances where geometries preclude internal welds, 100% full penetration welds are provided. To minimize sources of virtual leaks, external welds are only used when required for structural reinforcement and are limited to stitch, skip, span, or spot weld configurations.
State-of-the-art, multi-axis, CNC machine centers are at the heart of ANCORP’s operations. Our work processes are built upon the dual goals of high quality and rapid turnaround. Our machining coolants are sulphur free, biodegradable, and recycled.
Flanges and machined components (faced, turned or bored) come standard with a 32 micro-inch surface finish. Chambers
are internally and externally bead blasted. Electropolishing and manual polishing are additional options.
Cleaning and Packaging of Custom Chambers
Upon final machining, all components are washed in a heated, ultrasonic, detergent bath followed by multiple ultrasonic, deionized water rinses to remove all residual machining lubricants. After final rinse, parts are blown dry with dry, heated, filtered air and packaged. After cleaning and testing, flanges and small components are hermetically sealed in vacuum board packaging and are ready for UHV installation. Larger flanges are covered with a layer of foil and protective plastic shields. Weldments and assemblies are then bagged, bubble-wrapped, and inserted into a shipping container surrounded by void filling “pillow” wrap. Custom crating is available.
Leak Testing and Quality Control
All weld joints and sealing surfaces are certified with state-of-the-art helium mass spectrometer leak detectors to a maximum rate of 1×10-9 std. cc helium. Leak testing is typically conducted in an “outside-in” or tracer-probe configuration. Helium (gas) bag tests are conducted as needed.
The highest standards of quality control inform every aspect of our operational practices. We welcome customer audits. Dimensional checks are confirmed with a computer controlled coordinate measuring machine (CMM). Material and CMM certifications can be provided upon request.
Please contact our technical sales team when requiring a quotation. Quotations can be generated from simple, freehand sketches. Electronic files should be sent in DWG, DXF, or IGES file formats. When needed, ANCORP can supply a complete set of engineered drawings.